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An Integrated Floating-Electrode Electric Microgenerator

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5 Author(s)
Wei Ma ; Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon ; Ruiqing Zhu ; Rufer, L. ; Zohar, Y.
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Microfabricated electric generators, scavenging ambient mechanical energy, are potential power sources for autonomous systems. Described presently are the design, modeling, and implementation of a single-wafer floating-electrode electric microgenerator, integrating a micromechanical resonator and a number of electronic devices. Forming a plate of a variable capacitor, the resonator is responsible for converting mechanical vibration to electricity. A sense transistor and a diode bridge are integrated, respectively, for monitoring the "charging" of the floating electrode and for rectification. A lumped electromechanical model of the generator is developed and expressed in terms of a set of nonlinear coupled state equations that are numerically solved. For small-amplitude excitation, a circuit based on a set of linearized equations is developed. The generator is realized using a compatible combination of standard complementary metal-oxide-semiconductor (CMOS) "floating gate" process and a post-CMOS photoresist molded electroplating process. Adequate agreement between model predictions and measurement results was obtained

Published in:

Microelectromechanical Systems, Journal of  (Volume:16 ,  Issue: 1 )