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Mechanically Controlled Quantum Contact With On-Chip MEMS Actuator

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7 Author(s)
Gel, M. ; Inst. of Ind. Sci., Univ. of Tokyo ; Ishida, Tadashi ; Akasaka, T. ; Umeno, A.
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We report fabrication and characterization of a mechanically controlled quantum point contact with on-chip electrostatic actuators. Two metallic tips separated with a nano gap are integrated with a micro mechanism, which can be actuated by applied voltage. The electrostatic actuation of the micro mechanism allows the control of separation gap at nanometer level. The gap variation at nanometer level is calibrated with the devices operated in transmission electron microscope. Furthermore, performance of the device is demonstrated by measuring conductance quantization while separating the tips in contact as well as electrical measurements by using tips coated with self assembled monolayers (1-4 benzene dithiol) and conjugated Ru complex

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Microelectromechanical Systems, Journal of  (Volume:16 ,  Issue: 1 )