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Silicon nanocrystal memory - technology and applications

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1 Author(s)
Ko-Min Chang ; Austin Silicon Technol. Solutions, Freescale Semicond., Inc., Austin , TX

This paper describes the latest development in the area of silicon nanocrystal memory. Since Tiwari introduced the device concept in 1996 (Tiwari et al., 1996), much progress has been made in the areas of nanocrystal deposition, stack engineering, process integration, cell operation, and array architecture. Instead of giving a broad review of the art of semiconductor memories made with quantum dots or nanoparticles, a narrower focused update of the Freescale implementation of the silicon nanocrystal memory as an embedded flash solution is highlighted here

Published in:

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Date of Conference:

Oct. 2006