By Topic

Calibration of Multi-Axis MEMS Force Sensors Using the Shape-From-Motion Method

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Keekyoung Kim ; Mech. & Ind. Eng. Dept., Univ. of Toronto, Ont. ; Yu Sun ; Richard M. Voyles ; Bradley J. Nelson

Precise calibration of multi-axis microelectromechanical systems (MEMS) force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro- and nanoNewton (nN) force scales, and the risk of damaging the small, fragile microdevices. To tackle these challenges, this paper introduces the shape-from-motion calibration method. A new design of a two-axis MEMS capacitive force sensor with high linearity and nN resolutions is presented. Structural-electrostatic coupled-field simulations are conducted in order to optimize the sensor design. The designed sensor is calibrated with the shape-from-motion method, the least-squares method as well as the gravity-based method for comparison purposes. Calibration results demonstrate that the shape-from-motion method provides a rapid, practical, and accurate technique for calibrating multi-axis MEMS sensors

Published in:

IEEE Sensors Journal  (Volume:7 ,  Issue: 3 )