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Calibration of Multi-Axis MEMS Force Sensors Using the Shape-From-Motion Method

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4 Author(s)
Keekyoung Kim ; Mech. & Ind. Eng. Dept., Univ. of Toronto, Ont. ; Yu Sun ; Voyles, R.M. ; Nelson, B.J.

Precise calibration of multi-axis microelectromechanical systems (MEMS) force sensors is difficult for several reasons, including the need to apply many known force vectors at precise orientations at the micro- and nanoNewton (nN) force scales, and the risk of damaging the small, fragile microdevices. To tackle these challenges, this paper introduces the shape-from-motion calibration method. A new design of a two-axis MEMS capacitive force sensor with high linearity and nN resolutions is presented. Structural-electrostatic coupled-field simulations are conducted in order to optimize the sensor design. The designed sensor is calibrated with the shape-from-motion method, the least-squares method as well as the gravity-based method for comparison purposes. Calibration results demonstrate that the shape-from-motion method provides a rapid, practical, and accurate technique for calibrating multi-axis MEMS sensors

Published in:

Sensors Journal, IEEE  (Volume:7 ,  Issue: 3 )