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CMOS-Based Tactile Microsensor for Medical Instrumentation

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4 Author(s)
Salo, T. ; Phys. Electron. Lab., Swiss Fed. Inst. of Technol., Zurich ; Kirstein, K.-U. ; Vancura, T. ; Baltes, H.

This paper presents a novel tactile sensing device aimed at a variety of medical instrumentation applications, including extravascular blood pressure monitoring, distinguishing a coronary artery from a nearby running cardiac vein, and locating the site of a coronary occlusion. The monolithically integrated microsensor is fabricated using an industrial CMOS process with a limited number of postmicromachining steps. Using the tonometric principle, an array of membrane capacitors can detect and monitor the pulsatile pressure variations inside a blood vessel

Published in:

Sensors Journal, IEEE  (Volume:7 ,  Issue: 2 )