Referenced Items are not available for this document.
In this letter, we report the fabrication, modeling and characterization of an all-optically addressed spring patterned silicon-nitride deformable mirror microelectromechanical-systems device. Combinations of high-frequency ac and dc bias voltages are applied across the device. The experimental verified theoretical modeling for this device shows the mirror deflection saturation as a function of light intensity appropriate for the dynamic range compression deconvolution. Frequency response up to 10MHz, practical for correcting very fast turbulences, was measured
Published in:
Photonics Technology Letters, IEEE
(Volume:19
,
Issue:
3
)
Date of Publication: Feb.1, 2007
- Page(s):
- 173 - 175
- ISSN :
- 1041-1135
- INSPEC Accession Number:
- 9260714
- Digital Object Identifier :
- 10.1109/LPT.2006.890029
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 01 March 2007
- Issue Date :
- Feb.1, 2007
- Sponsored by :
- IEEE Photonics Society
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