By Topic

Patterned Multipixel Membrane Mirror MEMS Optically Addressed Spatial Light Modulator With Megahertz Response

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Griffith, G. ; Phys. Dept., Univ. of Massachusetts, Lowell, MA ; Haji-saeed, B. ; Sengupta, S.K. ; Goodhue, W.D.
more authors

In this letter, we report the fabrication, modeling and characterization of an all-optically addressed spring patterned silicon-nitride deformable mirror microelectromechanical-systems device. Combinations of high-frequency ac and dc bias voltages are applied across the device. The experimental verified theoretical modeling for this device shows the mirror deflection saturation as a function of light intensity appropriate for the dynamic range compression deconvolution. Frequency response up to 10MHz, practical for correcting very fast turbulences, was measured

Published in:

Photonics Technology Letters, IEEE  (Volume:19 ,  Issue: 3 )