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Hydrocarbon and Fluorocarbon Monitoring by MIS Sensors Using an Ni Catalytic Thermodestructor

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5 Author(s)
Filippov, V.I. ; Res. Center, Kurchatov (I.V.) Inst. of Atomic Energy, Moscow ; Moritz, W. ; Terentjev, A.A. ; Vasiliev, A.A.
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An increase in the number of gases detectable by sensors based on Pd-SiO2-Si (MIS) and Pt-LaF3-Si3N4 -SiO2-Si (MEIS) structures was achieved by the application of an external catalyst element (CE). It was shown that as a result of the decomposition of hydrocarbon and fluorocarbon molecules on a Ni coil (CE), the products detectable by metal-insulator-semiconductor (MIS) and metal-electrolyte-insulator-semiconductor (MEIS) sensors are formed. The simultaneous catalytic oxidation of hydrocarbons and their thermal decomposition result in an optimum CE temperature of about 1050 K for propane. The kinetics of the thermal decomposition of gases on Ni were investigated. The activation energy of the reaction for C3 H8 and the enthalpy in the case of CF3-CCl were estimated

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Sensors Journal, IEEE  (Volume:7 ,  Issue: 2 )