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Global Identification of Variability Factors and Its Application to the Statistical Worst-Case Model Generation

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6 Author(s)
Eikyu, K. ; Renesas Technol. Corp., Hyogo ; Okagaki, T. ; Tanizawa, M. ; Ishikawa, K.
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A novel methodology is presented to generate the worst-case model including extraction of its compact model parameters. This method enables physically accurate worst-case prediction in the early stage of device development concurrently. It is found through the intensive TEG analysis and TCAD simulation that correlations between process factors have a significant impact on the worst-case corner estimation. A new extraction method of compact model parameters based on error propagation analysis is developed to consider correlations between parameters

Published in:

Simulation of Semiconductor Processes and Devices, 2006 International Conference on

Date of Conference:

6-8 Sept. 2006