Referenced Items are not available for this document.
This paper presents design considerations and implementations of monolithic controllers for smart sensors that make use of micromachined structures such as micromembranes and microcantilevers. Five control techniques are reviewed, and the classic control technique is selected for the design of the controllers. The circuit implementations of an analog proportional controller and a digital proportional-integral-derivative controller are described in detail. The first controller is used for controlling the microhotplate (micromembrane) temperature of a monolithic metal-oxide gas sensor array. The second controller is used for controlling the microcantilever deflection of a monolithic atomic force microscope. The controllers and microsensors are fabricated in standard 0.8-mum CMOS technology combined with post-CMOS micromachining. Chemical measurements and contact-mode imaging are performed to confirm the excellent performance of these monolithic controllers
Published in:
Circuits and Systems I: Regular Papers, IEEE Transactions on
(Volume:54
,
Issue:
1
)
Date of Publication: Jan. 2007
- Page(s):
- 141 - 152
- ISSN :
- 1549-8328
- INSPEC Accession Number:
- 9306045
- Digital Object Identifier :
- 10.1109/TCSI.2006.887457
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 15 January 2007
- Issue Date :
- Jan. 2007
- Sponsored by :
- IEEE Circuits and Systems Society
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