Cart (Loading....) | Create Account
Close category search window

Research on Skill Knowledge and Process Simulation-Based Virtual MEMS Manufacturing System

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Guang-Yi Sun ; Inst. of Robotics & Inf. Autom. Syst., Tianjin, China ; Xin Zhao ; Gui-Zhang Lu

This paper puts forward the concept of virtual MEMS manufacturing system based on skill knowledge and process simulation. Concretely, using optical lithography as the breakthrough, this paper details a virtual lithography prototyping system and key problems. In addition, the alignment simulation example of fabricating micro-acceleration indicates the feasibility of system.

Published in:

Control Conference, 2006. CCC 2006. Chinese

Date of Conference:

7-11 Aug. 2006

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.