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Low Temperature Microcrystalline Silicon Solar Cells Prepared by Hot-Wire Chemical Vapor Deposition

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3 Author(s)
M. M. Adachi ; School of Engineering Science, Simon Fraser University, Burnaby, BC, Canada ; W. f. l. Tse ; K. S. Karim

Intrinsic hydrogenated microcrystalline silicon (muc-Si:H) films were prepared by hot-wire chemical vapor deposition (HWCVD) using a graphite filament at a substrate temperature of 210degC. Films were characterized by Raman Spectroscopy, FTIR and electrical conductivity measurements with varying silane concentrations on glass substrates. Solar cells were fabricated in a glass/SnO2/pin/Al structure and device efficiency was measured to be 2.8%

Published in:

2006 IEEE 4th World Conference on Photovoltaic Energy Conference  (Volume:2 )

Date of Conference:

May 2006