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Design, Simulation, and Fabrication of an On-Chip Antenna Fabricated Using Silicon Micromachining for Broad-Band Millimeter-Wave Wireless Communications

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3 Author(s)
Sedaghat-Pisheh, H. ; Sch. of Electr. & Comput. Eng., Tehran Univ. ; Shahabadi, M. ; Shamsodin Mohajerzadeh

Design, simulation, and fabrication of a broadband coplanar-waveguide (CPW)-fed on-chip antenna is presented. The antenna is of slot type and has the shape of a bow-tie with rounded truncation. The antenna is designed for unlicensed 60 GHz band, i.e., 58-64 GHz for millimeter-wave (mm-wave) communications. To maximize the radiation efficiency of the antenna, the authors have used bulk micromachining method for low-resistivity silicon. Simulation results of the antenna using 3D finite integral techniques are presented

Published in:

Microwave Conference, 2006. 36th European

Date of Conference:

10-15 Sept. 2006