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Electromagnetic-Thermal Analysis for Inductances and Eddy Current Losses of On-chip Spiral Inductors on Lossy Silicon Substrate

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5 Author(s)
Kai Kang ; Department of Electrical & Computer Engineering, National University of Singapore, Singapore 119260; LGEP-Supélec, Gif-Sur-Yvette, France 91192; Institute of Microelectronics, Singapore 117685. Email: kangkai@nus.edu.sg ; Le-wei Li ; Said Zouhdi ; Jinglin Shi
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Electromagnetic and thermal analysis for conventional and differential spiral inductors on lossy silicon substrate is rigorously carried out in this paper. Accurate analytical expressions for calculating the frequency- and temperature-dependent inductances and substrate losses due to eddy currents are presented. The simulation results agree well with the measured data. These closed-form expressions offer the great insights into lossy substrate effects as a function of both the frequency and temperature on the performance of on-chip spiral inductors

Published in:

2006 European Microwave Integrated Circuits Conference

Date of Conference:

10-13 Sept. 2006