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CMOS based bioparticle capacitive sensor integrated with direct-write microfluidic devices

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2 Author(s)
Ghafar-Zadeh, E. ; Dept. of Electr. Eng., Ecole Polytech. de Montreal, Que. ; Sawan, M.

In this paper, a charge-based capacitive sensor with embedded electrodes inside microchannel is described for precision and reliable bioparticle detection. Also, a highly accurate switching calibration technique for this capacitive sensor is presented. The simulation results are demonstrated to support the discussed objectives throughout the paper

Published in:

Electrical and Computer Engineering, 2006. CCECE '06. Canadian Conference on

Date of Conference:

May 2006