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Nanopatterning of InP(001) surface using e-beam lithography to localize InAs quantum dots for single photon source application

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5 Author(s)
Turala, A. ; Ecole Centrale de Lyon, Ecully ; Rojo-Romeo, P. ; Regreny, P. ; Gendry, M.
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This work is devoted to the localization of InAs quantum dots grown by SSMBE on nanostructured InP(001) surfaces: mesas or holes are the sites of privileged nucleation of the quantum dots (QDs). Both nanostructuration methods are compared. The principle of fabrication of a photonic crystal cavity based source with localized QDs is described

Published in:

Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE

Date of Conference:

Oct. 29 2006-Nov. 2 2006