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Planar High-Q Microresonators for Chip-Scale Integrated Silicon Photonics

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3 Author(s)
Mohammad Soltani ; School of Electrical and Computer Engineering, Georgia Institute of Technology, 777 Atlantic Drive NW, Atlanta, GA 30332-0250 ; Siva Yegnanarayanan ; Ali Adibi

In this paper we present fabrication and characterization of high Q microdisk resonators on a silicon-on-insulator (SOI) platform. We also present the planar integration of the input/output coupling waveguides with the microdisk resonator. The effect of substrate leakage loss is evaluated by comparing the performance of resonator-on-substrate versus undercut type resonators. Detailed measurements of Q and nonlinear response using lock-in technique with amplitude and phase response for both resonator structures is presented

Published in:

LEOS 2006 - 19th Annual Meeting of the IEEE Lasers and Electro-Optics Society

Date of Conference:

Oct. 29 2006-Nov. 2 2006