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Parallel-Coupled Square-Resonator Micromechanical Filter Arrays

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5 Author(s)
Clark, J.R. ; Discera, Inc., Ann Arbor, MI ; Minfan Pai ; Wissman, B. ; Guohong He
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Large, parallel-coupled arrays of micromechanical square resonators have been demonstrated, greatly reducing the equivalent impedance of the aggregate resonator by up to a factor of 30 in an array of 30 strongly-coupled devices while retaining quality factors approaching 10,000. In addition, multiple strong-coupled arrays have been weakly coupled via mechanical linkage in order to form a 10.7MHz IF filter, such as would be required in a heterodyning FM radio system, with greatly reduced matching impedance requirements

Published in:

International Frequency Control Symposium and Exposition, 2006 IEEE

Date of Conference:

June 2006