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Predictions and measurement of mass loading effects on quartz bulk acoustic wave resonators

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4 Author(s)
I. Mateescu ; National Institute of Materials Physics, Bucharest-Magurele, Romania, ; C. Bran ; S. Ballandras ; D. Gachon

The use of a variational perturbation method combined with finite element analysis is presented here to simulate the influence of mass-loading effects on the resonance frequency of bulk acoustic wave resonator. Computations are conducted on 2D and 3D and any shape of resonator can be considered. Predictions are compared to experimental data

Published in:

2006 IEEE International Frequency Control Symposium and Exposition

Date of Conference:

June 2006