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Low-loss near-infrared passive optical waveguide components formed by electron beam irradiation of silica-on-silicon

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3 Author(s)
Syms, R.R.A. ; Dept. of Electr. & Electron. Eng., Imperial Coll. of Sci., Technol. & Med., London, UK ; Tate, T.J. ; Bellerby, R.

Results are presented for a range of near infrared single-mode passive channel waveguide optical components fabricated in PECVD silica-on-silicon by electron beam irradiation. The devices include S-bends, Mach-Zehnder interferometers, Y-junction tree-structured splitters, and directional couplers. It is shown that low loss may be obtained through appropriate choice of waveguide bend radius and fabrication parameters; fiber-device insertion losses of ≈2 dB and ≈1 dB are achieved for 1×8 splitters and 3-dB directional couplers, respectively, at λ=1.525 μm

Published in:

Lightwave Technology, Journal of  (Volume:13 ,  Issue: 8 )

Date of Publication:

Aug 1995

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