Results are presented for a range of near infrared single-mode passive channel waveguide optical components fabricated in PECVD silica-on-silicon by electron beam irradiation. The devices include S-bends, Mach-Zehnder interferometers, Y-junction tree-structured splitters, and directional couplers. It is shown that low loss may be obtained through appropriate choice of waveguide bend radius and fabrication parameters; fiber-device insertion losses of ≈2 dB and ≈1 dB are achieved for 1×8 splitters and 3-dB directional couplers, respectively, at λ=1.525 μm
Published in:
Lightwave Technology, Journal of
(Volume:13
,
Issue:
8
)
Date of Publication: Aug 1995