Referenced Items are not available for this document.
This letter reports on the design, fabrication, and characterization of a high Q electrolyte insulator silicon (EIS) capacitive structure and its application to LC wireless chemical sensors. LC sensors are based on the variation of inductance or capacitance in response to changes in the magnitude of interest. In this new type of LC sensor, the EIS structure is used as a pH-to-capacitance transductor. A double electrode scheme, one for stable dc potential and another for low ac series resistance, has been adopted in order to obtain sufficient Q at the resonator. An almost linear response and a sensitivity of 1% frequency change per pH unit have been achieved
Published in:
Electron Device Letters, IEEE
(Volume:28
,
Issue:
1
)
Date of Publication: Jan. 2007
- Page(s):
- 27 - 29
- ISSN :
- 0741-3106
- INSPEC Accession Number:
- 9258159
- Digital Object Identifier :
- 10.1109/LED.2006.888189
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 26 December 2006
- Issue Date :
- Jan. 2007
- Sponsored by :
- IEEE Electron Devices Society
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