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Electrostatic transducers for micromechanical resonators: free space and solid dielectric

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3 Author(s)
Kaajakari, V. ; VTT, Tech. Res. Center of Finland, Espoo ; Alastalo, A.T. ; Mattila, T.

Three electrostatic transduction methods are analyzed for a micromechanical, longitudinal mode, beam resonator. The conventional parallel plate transducer placed at the location of maximum displacement is compared to two solid, dielectric transducers internal to the resonator. Although the solid dielectric offers higher permittivity than the free-space-filled transducers, the unfavorable locations of the internal transducers reduce or even remove the performance advantage of the higher permittivity

Published in:

Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 12 )

Date of Publication:

December 2006

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