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Potential of acoustic imaging in the detection of nanometer gaps

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3 Author(s)
Tohmyoh, H. ; Dept. of Nanomechanics, Tohoku Univ., Sendai ; Saka, Masumi ; Hirayama, H.

The potential of the water-immersion and dry-contact acoustic imaging techniques for detecting nanometer gaps embedded in silicon is studied. The sensitivity for detecting gaps of over 10 nm in height is governed only by the lateral resolution of the imaging and is independent of the height of the gap

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Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 12 )