By Topic

High-temperature 434 MHz surface acoustic wave devices based on GaPO/sub 4/

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Hamidon, M.N. ; Sch. of Electron. & Comput. Sci., Southampton Univ. ; Skarda, V. ; White, N.M. ; Krispel, F.
more authors

Research into surface acoustic wave (SAW) devices began in the early 1970s and led to the development of high performance, small size, and high reproducibility devices. Much research has now been done on the application of such devices to consumer electronics, process monitoring, and communication systems. The use of novel materials, such as gallium phosphate (GaPO4), extends the operating temperature of the elements. SAW devices based on this material operating at 434 MHz and up 800degC, can be used for passive wireless sensor applications. Interdigital transducer (IDT) devices with platinum/zirconium metallization and 1.4 mum finger-gap ratio of 1:1 have been fabricated using direct write e-beam lithography and a lift-off process. The performance and long-term stability of these devices has been studied, and the results are reported in this paper

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:53 ,  Issue: 12 )