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Performance of Josephson array systems related to fabrication techniques and design

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6 Author(s)
Muller, F. ; Physikalisch Tech. Bundesanstalt, Braunschweig, Germany ; Kohlmann, J. ; Hebrank, F.X. ; Weimann, T.
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Arrays of Nb/Al/sub 2/O/sub 3//Nb Josephson tunnel junctions show dc characteristics of high quality when the trilayer is deposited direct on polished Si wafers. Underlayers such as rf-sputtered SiO/sub 2/, can considerably degrade the junction parameters. These results suggest that voltage standard chips should be produced with a cover instead of a groundplane. First results of attenuation measurements on such circuits are presented and discussed. Furthermore, a new and more simple fabrication process without a window-insulating layer and only two photolithographic steps is presented. Arrays of several thousands of junctions showed no problems of any kind with trapped flux.<>

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Applied Superconductivity, IEEE Transactions on  (Volume:5 ,  Issue: 2 )