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Electrothermal frequency tuning of a nano-resonator

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3 Author(s)
Jun, S.C. ; Dept. of Mech. Eng., Columbia Univ., New York, NY ; Huang, X.M.H. ; Hone, J.

Electrothermal tuning of nanomechanical silicon carbide resonators has been demonstrated. The detected mechanical resonance of the untuned resonator was 10.12 MHz and has a quality factor of about 2000 as measured using the magnetomotive transduction technique. Also, the resonance frequency was tuned by 10% with Joule heating of DC current

Published in:

Electronics Letters  (Volume:42 ,  Issue: 25 )