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Laser patterning of YBa/sub 2/Cu/sub 3/O/sub x/ thin films protected by in-situ grown SrTiO/sub 3/ cap layer

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4 Author(s)
Kula, W. ; Dept. of Electr. Eng., Rochester Univ., NY, USA ; Wei Xiong ; Sobolewski, R. ; Talvacchio, J.

We report our studies on laser processing techniques suitable for patterning of YBa/sub 2/Cu/sub 3/O/sub 7-x/ (YBCO) thin films, as well as YBCO/SrTiO/sub 3/ bilayers, consisting of in-situ grown YBCO films with 100-nm-thick single-crystalline SrTiO/sub 3/ cap layers. The patterning is achieved through both laser inhibition, in which an intense, focused laser beam locally melts YBCO transferring it into an insulating glass-like material, and laser writing, based on a laser-controlled diffusion of oxygen in or out of the YBCO film. We have found that oxygen easily migrates through the SrTiO/sub 3/ layer, allowing to reversibly convert the underlying YBCO film between the superconducting and semiconducting (virtually insulating at low temperatures) phases. Using laser inhibition and writing, we were able to form in a single YBCO/SrTiO/sub 3/ sample well-defined regions of various electrical properties, showing that laser processing can be successfully used in patterning and/or electrical trimming of multilayered YBCO circuits. Aging studies, performed on an almost 2-years-old laser-written YBCO film, showed a very good, both structural and electrical stability of our laser-processed structures.<>

Published in:

Applied Superconductivity, IEEE Transactions on  (Volume:5 ,  Issue: 2 )

Date of Publication:

June 1995

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