Skip to Main Content
Summary form only for tutorial. This tutorial is the first presented by the authors of Smart MEMS and Sensor Systems (2006, Imperial College Press). The aim of the tutorial is to present the directions of research, development and technological evolution for Electro Mechanical Microsystems, and in particular microsensors. The development of MEMS devices has generally followed a bottom up methodology, reaching now a stage where the capabilities of the devices could be used much more effectively in systems designed from the top down to include them. A holistic view of the requirements of MEMS based systems and the capabilities of the microdevices must be taken if such systems are to deliver the promise that was expected. This tutorial provides the integrative perspective required for workers in all areas of the field, to enable them to appreciate the system level design issues leading to breakthrough sensing applications.