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Comparison of experimental target currents with analytical model results for plasma immersion ion implantation

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3 Author(s)
En, W.G. ; Dept. of Electr. Eng. & Comput. Sci., California Univ., Berkeley, CA, USA ; Lieberman, M.A. ; Cheung, Nathan W.

An analytical model of the voltage and current characteristics of a remote plasma is presented. The model simulates, the ion, electron and secondary electron currents induced before, during and after a high voltage negative pulse is applied to a target immersed in a plasma. The model also includes analytical relations that describe the sheath expansion and collapse due to negative high voltage pulses. The sheath collapse is found to be important for high repetition rate pulses. Good correlation is shown between the model and experiment for a wide variety of voltage pulses and plasma conditions

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Plasma Science, IEEE Transactions on  (Volume:23 ,  Issue: 3 )