By Topic

A Planar High- Q Micromachined Monolithic Half-Coaxial Transmission-Line Filter

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Llamas-Garro, I. ; Large Millimeter Telescope Group, Nat. Inst. for Astrophys., Opt. & Electron., Puebla ; Kim, Yongsung ; Chang-Wook Baek ; Yong-Kweon Kim

In this paper, a surface micromachined high-Q planar transmission line is presented. The proposed structure is a half-coaxial transmission line on a quartz substrate. The half-coaxial transmission line has a 100-mum air gap between the half-coaxial center conductor and ground plane. The unloaded quality factor extracted from an experimental resonator was 153 at 32 GHz. The proposed structure can be easily integrated with other components on a chip and can be used to partially isolate components, e.g., a microwave filter. A three-pole 5% fractional bandwidth filter centered at 31.75 GHz with a Chebyshev response has been designed with the proposed half-coaxial transmission line, where a measured insertion loss of 2.83 dB has been obtained. Variations in filter response due to different etch hole positions on the suspended ground plane is discussed

Published in:

Microwave Theory and Techniques, IEEE Transactions on  (Volume:54 ,  Issue: 12 )