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A High- Q Widely Tunable Gigahertz Electromagnetic Cavity Resonator

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5 Author(s)
Hou, S.M. ; Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA ; Lang, Jeffrey H. ; Slocum, A.H. ; Weber, A.C.
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This paper describes the design, fabrication and testing of a quasi-static electromagnetic cavity resonator fabricated using potassium-hydroxide (KOH) etching, shallow reactive-ion etching (RIE), metalization and wafer bonding. The resonator is distinguished by its simultaneous high-Q near 200, and wide high-frequency tuning range, 2.5-4.0 GHz for the experimental resonator presented here. When combined with an integrated actuator, it should be suitable for use in electronically tunable radio-frequency (RF) bandpass filters and oscillators. The experimental resonator, however, is tuned with an external piezoelectric actuator for simplicity

Published in:

Microelectromechanical Systems, Journal of  (Volume:15 ,  Issue: 6 )