By Topic

Indium Phosphide Optical MEMS for Chemical and Biological Sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Siwak, N. ; Dept. of Electr. & Comput. Eng., Maryland Univ., College Park, MD ; McGee, J. ; Ghodssi, R.

We present a resonant cantilever sensor for use in chemical and biological sensing applications. Electrostatically actuated suspended indium phosphide (InP) waveguides are used as the sensing cantilevers. This sensor uses an integrated optical detection scheme which eliminates the need for free space optical components seen in traditional systems. Discussions on device design as well as data collection methods are presented. Mass sensitivity in the range of Deltam = 6.6times10-15 g is reported, comparable to similar cantilever sensor designs. Integration of waveguide cantilever sensors with on chip optical sources and detectors is also discussed

Published in:

Life Science Systems and Applications Workshop, 2006. IEEE/NLM

Date of Conference:

13-14 July 2006