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Multi-Bit Distributed MEMS Inductors

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3 Author(s)
S. Balachandran ; Center for Wireless and Microwave Information Systems, University of South Florida, Tampa, FL-33620 ; B. Lakshminarayanan ; T. Weller

This paper presents multi-bit MEMS inductors that operate from 5-40GHz. Tunability is achieved by the individual actuation of cantilever beams suspended on the center conductor and ground planes of coplanar waveguide. Inductance ratios of 1.2-3.0 were achieved over frequency with the inductance value ranging from 0.24nH to 0.73nH at 40GHz

Published in:

2006 IEEE MTT-S International Microwave Symposium Digest

Date of Conference:

11-16 June 2006