Multi-Bit Distributed MEMS Inductors

This paper presents multi-bit MEMS inductors that operate from 5-40GHz. Tunability is achieved by the individual actuation of cantilever beams suspended on the center conductor and ground planes of coplanar waveguide. Inductance ratios of 1.2-3.0 were achieved over frequency with the inductance value ranging from 0.24nH to 0.73nH at 40GHz