Referenced Items are not available for this document.
The purpose of this paper is to present novel optical imaging techniques, based on all active optical polarimetric principles, for efficient detection, inspection, and monitoring of semiconductor components, microelectronic components, and spacecraft structures. The experimental results of this paper indicate that the polarimetric imaging techniques are highly efficient in detecting defects on the semiconductor structures when compared to nonpolarimetric techniques
Published in:
Instrumentation and Measurement, IEEE Transactions on
(Volume:55
,
Issue:
6
)
Date of Publication: Dec. 2006
- Page(s):
- 2126 - 2131
- ISSN :
- 0018-9456
- INSPEC Accession Number:
- 9193765
- Digital Object Identifier :
- 10.1109/TIM.2006.884110
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 20 November 2006
- Issue Date :
- Dec. 2006
- Sponsored by :
- IEEE Instrumentation and Measurement Society
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