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Investigation of the TiN Gate Electrode With Tunable Work Function and Its Application for FinFET Fabrication

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12 Author(s)
Yongxun Liu ; Nat. Inst. of Adv. Ind. Sci. & Technol. ; Kijima, S. ; Sugimata, E. ; Masahara, M.
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The titanium nitride (TiN) gate electrode with a tunable work function has successfully been deposited on the sidewalls of upstanding Si-fin channels of FinFETs by using a conventional reactive sputtering. It was found that the work function of the TiN (phiTiN) slightly decreases with increasing nitrogen (N2) gas flow ratio, RN=N2/(Ar+N2) in the sputtering, from 17% to 100%. The experimental threshold voltage (Vth) dependence on the RN shows that the more RN offers the lower Vth for the TiN gate n-channel FinFETs. The composition analysis of the TiN films with different RN showed that the more amount of nitrogen is introduced into the TiN films with increasing RN, which suggests that the lowering of phi TiN with increasing RN should be related to the increase in nitrogen concentration in the TiN film. The desirable Vth shift from -0.22 to 0.22 V was experimentally confirmed by fabricating n+ poly-Si and TiN gate n-channel multi-FinFETs without a channel doping. The developed simple technique for the conformal TiN deposition on the sidewalls of Si-fin channels is very attractive to the TiN gate FinFET fabrication

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Nanotechnology, IEEE Transactions on  (Volume:5 ,  Issue: 6 )