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Diagnostics of TM010-mode microwave cavity discharges in CO2-N2-He laser gas mixtures. I. Measurement of dielectric constant

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2 Author(s)
Ikeda, Tetsuya ; Adv. Technol. Res. Center, Mitsubishi Heavy Ind. Ltd., Hiroshima, Japan ; Danno, Minoru

Plasma parameters in the microwave discharged CO2 laser gas mixtures of CO2-N2-He=0.9/2.5/20 at 25 Torr obtained using the perturbation method for a TM010-mode cylindrical resonant cavity were examined. From the changes in resonant frequencies and Q values of the cavity, dielectric constant of the discharged plasma under the condition of RF to laser output power conversion ratio of 14% at mass flow rate of 4.2 kg/h was determined to be nearly 0.96-0.01j. It was also obtained from the dielectric constants of the plasma that electron number density, the electron temperature, and discharge parameters (E/n) were (0.3-3)×1015m-3, 0.5-2.7 eV, and (0.5-2)×10-15 Vcm2, respectively

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Quantum Electronics, IEEE Journal of  (Volume:31 ,  Issue: 8 )