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Quantum well intermixing with high spatial selectivity using a pulsed laser technique

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6 Author(s)

The authors demonstrate a new quantum well intermixing technique which allows bandgap shifts of typically 100 meV to be realised with a high spatial resolution in a GalnAs/GaInAsP MQW waveguide structure. The material was irradiated with pulses from a Q-switched Nd:YAG laser, and was then subjected to rapid thermal annealing at 700°C for several minutes. The spatial resolution of the disordering process was investigated across a masked interface, and was determined to be ⩽25 μm

Published in:

Electronics Letters  (Volume:31 ,  Issue: 15 )