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Enhancement of domain inversion in LiTaO3 using heat treatment with metal-oxide mask

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2 Author(s)
Yi, S.-Y. ; Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea ; Shin, S.-Y.

The domain inversion depth is enhanced in proton-exchanged LiTaO 3 using heat treatment with a metal-oxide mask. Since this method can lower the proton exchange rate to get the same domain inversion depth, the degradation of the crystal quality in the domain-inverted layer is reduced

Published in:

Electronics Letters  (Volume:31 ,  Issue: 15 )

Date of Publication:

20 Jul 1995

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