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Performance improvement of optical actuator by double sides irradiation

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4 Author(s)
Fukuda, T. ; Dept. of Mechano-Inf. & Syst., Nagoya Univ., Japan ; Hattori, S. ; Arai, F. ; Nakamura, H.

As a microactuator, we focus on a bimorph type piezoelectric actuator which has relatively large displacement. We made it and improved its response characteristics by irradiating the ultraviolet rays from the both sides of the actuator. Time to change the bending direction of this actuator is extremely improved compared with the previous single side irradiation. We proposed the PWM control for the actuator to change the strength of the ultraviolet rays and presented the model of this control system. Experimental results show the control system performance is fairly improved

Published in:

Industrial Electronics, Control and Instrumentation, 1994. IECON '94., 20th International Conference on  (Volume:3 )

Date of Conference:

5-9 Sep 1994