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Crystal silicon Fabry-Perot cavities deposited with dichlorosilane in a reduced pressure chemical vapour deposition reactor for thermal sensing

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2 Author(s)
Chao, H.C. ; Nat. Dong-Hwa Univ., Hualien, Taiwan ; Neudeck, G.W.

A surface-normal Fabry-Perot (FP) thermal sensor with embedded multiple QW dielectric mirrors, was fabricated and evaluated using a single crystal merged silicon epitaxial lateral overgrowth (MELO) technique. The sensitivity of the sensor has been improved owing to the higher finesse

Published in:

Electronics Letters  (Volume:31 ,  Issue: 13 )