A 1.3-/spl mu/m wavelength, strained multiple quantum well InGaAsP-InP folded-cavity surface-emitting laser was fabricated using CH/sub 4/:H/sub 2/ reactive ion etching to form the 45/spl deg/ angled vertical output facet. A pulsed threshold current of 45 mA and a 20% efficiency for the surface-emitted light were achieved for 550 /spl mu/m-long by 5 /spl mu/m-wide devices. The threshold current is the lowest reported for folded-cavity surface-emitting lasers operating at this wavelength, making the devices suitable for many optoelectronic smart pixel and interconnection applications. To our knowledge, this is the first demonstration of an InP-based folded-cavity structure using CH/sub 4/:H/sub 2/ reactive ion etching.<
Published in:
Photonics Technology Letters, IEEE
(Volume:6
,
Issue:
12
)
Date of Publication: Dec. 1994