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Micro-machined three-dimensional micro-optics for integrated free-space optical system

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4 Author(s)
Lin, L.Y. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Lee, S.S. ; Pister, K.S.J. ; Wu, M.C.

Novel, integrable three-dimensional micro-optical elements have been realized by surface micromachining technology. Rotatable mirrors, lenses and beam-splitters standing perpendicular to the substrate are demonstrated. The optical elements are precisely held at 90/spl deg/ angle to the substrate by side latches. The Si substrate serves as a "micro-optical bench" on which monolithic micro-optical systems consisting of movable and static micro-mirrors, lenses and other components are constructed. The optical system is pre-aligned by photolithography. This technology offers a new approach to free-space integrated optics and low-cost optical packaging.<>

Published in:

Photonics Technology Letters, IEEE  (Volume:6 ,  Issue: 12 )

Date of Publication:

Dec. 1994

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