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Advanced TFT SRAM cell technology using a phase-shift lithography

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13 Author(s)
Yamanaka, T. ; Central Res. Lab., Hitachi Ltd., Tokyo, Japan ; Hashimoto, T. ; Hasegawa, N. ; Tanaka, T.
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An advanced TFT memory cell technology has been developed for making high-density and high-speed SRAM cells. The cell is fabricated using a phase-shift lithography that enables patterns with spaces of less than 0.25 μm to be made using the conventional stepper. Cell area is also reduced by using a small cell-ratio and a parallel layout for the transistor. Despite the small cell-ratio, stable operation is assured by using advanced polysilicon PMOS TFT's for load devices. The effect of the Si3N4 multilayer gate insulator on the on-current and the influence of the channel implantation are also investigated. To obtain stable operation and extremely low stand-by power dissipation, a self-aligned offset structure for the polysilicon PMOS TFT is proposed and demonstrated. A leakage current of only 2 fA/cell and an on-/off-current ratio of 4.6×106 are achieved with this polysilicon PMOS TFT in a memory cell, which is demonstrated in a experimental 1-Mbit CMOS SRAM chip that has an access time of only 7 ns

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Electron Devices, IEEE Transactions on  (Volume:42 ,  Issue: 7 )