An optical scanning technique is presented as an alternative to white light interferometry. In this technique, it is possible to eliminate the receiving interferometer used in a conventional two-interferometer white light interferometric system and hence a simple, stable and compact sensor device may be realized. A high resolution and large operating range also becomes possible with this system
Published in:
Lightwave Technology, Journal of
(Volume:13
,
Issue:
5
)
Date of Publication: May 1995