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Design method for sensing body of differential pressure transmitter using silicon diaphragm-type pressure sensor

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5 Author(s)
Matsuoka, Y. ; Instrum. Div., Hitachi Ltd., Ibaraki, Japan ; Yamamoto, Y. ; Tobita, T. ; Shimada, S.
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This paper describes a design method for the three-diaphragm-type sensing body of a differential pressure transmitter. This sensing body protects the silicon diaphragm-type pressure sensor from over-pressure. The design method includes information on how to decide the stiffness of each metal diaphragm and the liquid quantity needed to fill the sensing body. The differential pressure transmitter, with significant stabilities, has zero-influence errors of static pressure and over-pressure of less than -0.2% and ±0.1%, respectively, and is obtained at a measuring span of 25 kPa and a line pressure of 15 MPa

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Instrumentation and Measurement, IEEE Transactions on  (Volume:44 ,  Issue: 3 )