By Topic

Design method for sensing body of differential pressure transmitter using silicon diaphragm-type pressure sensor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Matsuoka, Y. ; Instrum. Div., Hitachi Ltd., Ibaraki, Japan ; Yamamoto, Y. ; Tobita, T. ; Shimada, S.
more authors

This paper describes a design method for the three-diaphragm-type sensing body of a differential pressure transmitter. This sensing body protects the silicon diaphragm-type pressure sensor from over-pressure. The design method includes information on how to decide the stiffness of each metal diaphragm and the liquid quantity needed to fill the sensing body. The differential pressure transmitter, with significant stabilities, has zero-influence errors of static pressure and over-pressure of less than -0.2% and ±0.1%, respectively, and is obtained at a measuring span of 25 kPa and a line pressure of 15 MPa

Published in:

Instrumentation and Measurement, IEEE Transactions on  (Volume:44 ,  Issue: 3 )