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Line-focus acoustic microscopy measurements of Nb/sub 2/O/sub 5//MgO and BaTiO/sub 3//LaAlO/sub 3/ thin-film/substrate configurations

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6 Author(s)
Lee, Y.-C. ; Center for Quality Eng. & Failure Prevention, Northwestern Univ., Evanston, IL, USA ; Achenbach, J.D. ; Nystrom, M.J. ; Gilbert, S.R.
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Line-focus acoustic microscopy has been used to measure the phase velocities of surface acoustic waves on bare MgO and bare LaAlO/sub 3/, and on Nb/sub 2/O/sub 5//MgO and BaTiO/sub 3//LaAlO/sub 3/ thin-film/substrate configurations. The thin films are polycrystalline materials. The substrates are anisotropic single-crystals. The measured angular variation of the surface acoustic wave velocities has been used to determine the elastic constants of MgO substrate and Nb/sub 2/O/sub 5/ thin-film. It has been assumed that the Nb/sub 2/O/sub 5/ films may be considered as essentially isotropic. The measurements for LaAlO/sub 3/ and BaTiO/sub 3//LaAlO/sub 3/ show anomalies which are attributed to twinning in the LaAlO/sub 3/ substrate.<>

Published in:

Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on  (Volume:42 ,  Issue: 3 )

Date of Publication:

May 1995

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