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Theoretical study on SAW characteristics of layered structures including a diamond layer

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6 Author(s)
H. Nakahata ; Res. Labs., Sumitomo Electr. Ind. Ltd., Itami, Japan ; A. Hachigo ; K. Higaki ; S. Fujii
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Diamond has the highest surface acoustic wave (SAW) velocity among all materials and thus can provide much advantage for fabrication of high frequency SAW devices when it is combined with a piezoelectric thin film. Basic SAW properties of layered structures consisting of a piezoelectric material layer, a diamond layer and a substrate were examined by theoretical calculation. Rayleigh mode SAW's with large SAW velocities up to 12,000 m/s and large electro-mechanical coupling coefficients from 1 to 11% were found to propagate in ZnO/diamond/Si, LiNbO/sub 3//diamond/Si and LiTaO/sub 3//diamond/Si structures. It was also found that a SiO/sub 2//ZnO/diamond/Si structure can realize a zero temperature coefficient of frequency with a high phase velocity of 8,000-9,000 m/s and a large electro-mechanical coupling coefficient of up to 4%.<>

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IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control  (Volume:42 ,  Issue: 3 )