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Multi-layered ultrasonic transducers employing air-gap structure

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4 Author(s)
Yoshimoto, S. ; Dept. of Electr. & Electron. Eng., Chiba Univ., Japan ; Sakamoto, M. ; Hashimoto, Ken-Ya ; Yamaguchi, Masatsune

Aiming at developing miniaturized ultrasonic image sensors with high spatial resolution, this paper proposes multi-layered ultrasonic transducers employing air-gap structure. Theoretical analysis suggests that if the device is optimally designed, its performance is little affected by the layer supporting the air-gap structure, and that low-loss, wide-bandwidth transducers having practical mechanical strength could be developed. The transducer consisting of polymer/Pyrex-glass/ZnO/Pyrex-glass layers was fabricated, and a conversion loss of 11.6 dB and -3 dB relative bandwidth of 7.8% were obtained. The transducer was also applied to nondestructive testing, and its basic performance was shown.<>

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:42 ,  Issue: 3 )