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An infrared-bi-color Schottky-barrier infrared CCD image sensor for precise thermal image

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8 Author(s)
Konuma, K. ; Microelectron. Res. Labs., NEC Corp., Sagamihara, Japan ; Asano, Y. ; Masubuchi, K. ; Utsumi, H.
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An infrared-bi-color image sensor was developed with barrier height controlled Schottky-barrier photo diode array for precise temperature image. Vertically arranged low and high barrier height diode pixels in horizontally stripe order were arranged by using a selective area ion implantation technique. Conventional monochromatic infrared image sensors have only measured the temperature for a black body object. The infrared-bi-color image sensor can precisely obtain the temperature image for gray bodies, whose emissivity values are unknown.<>

Published in:

Electron Devices Meeting, 1994. IEDM '94. Technical Digest., International

Date of Conference:

11-14 Dec. 1994