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Silicon micromachined SCALED technology

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2 Author(s)
Miu, Denny K. ; Dept. of Mech. Eng., California Univ., Los Angeles, CA, USA ; Yu-Chong Tai

Silicon micromachining technology will play an important role in the fabrication of high-bandwidth servo controlled microelectromechanical (mechatronic) components for super-compact disk drives. At the University of California, Los Angeles, and the California Institute of Technology, for the last three years, we have initiated a number of industry-supported joint research projects to develop the necessary technology building blocks for an integrated drive design of the future. These efforts include a silicon read/write head microgimbal with integrated electrical and mechanical interconnects, which targets the next-generation 30% form factor pico-sliders, and an electromagnetic piggyback microactuator in super-high-track-density applications, both of which utilize state-of-the-art silicon micromachining fabrication techniques

Published in:

Industrial Electronics, IEEE Transactions on  (Volume:42 ,  Issue: 3 )